| 摘要 |
PROBLEM TO BE SOLVED: To predict yield in high accuracy before starting designing the kinds of semiconductor device. SOLUTION: On the basis of an effective critical area value per unit area or unit capacity for each of circuit elements that is calculated before hand and an area or a capacity for each of circuit elements of a target product, the effective critical area value for each of the circuit elements of the target product is obtained. The effective critical area value therefor, defect density in the production line of the target product, and a specified yield model are used to calculate yield of the target product. COPYRIGHT: (C)2007,JPO&INPIT
|
