| 摘要 |
PROBLEM TO BE SOLVED: To provide a compound microscope capable of performing highly accurate SPM measurement in a short time. SOLUTION: In this microscope having SPM 6 capable of detecting the force of a physical property value by scanning the sample 3 surface by a probe and imaging it, and LSM capable of acquiring three-dimensional information of the surface shape of the sample 3, scanning orbit information of the SPM 6 is determined by a control part 11 based on the three-dimensional information acquired by the LSM, and a scanning orbit of the probe is controlled based on the scanning orbit information. COPYRIGHT: (C)2007,JPO&INPIT
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