发明名称 FIXTURE FOR WASHING SHEET-LIKE PARTS, WASHING APPARATUS AND WASHING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a washing fixture which damages no object to be washed (especially sheet-like object) even when pressurization washing is performed and can enhance a flow speed of detergents and realize a high washability. SOLUTION: The fixture J has no communication hole other than a detergent feeding port I and a detergent discharge port O, a support part D for supporting the object to be washed is provided on a wall surface of a storage space part in the fixture J and a means J3 for pressing the object to be washed is provided on a side opposed to the support part D. Thereby, the object to be washed is retained/fixed into the fixture J in the state that a flow passage S is formed such that both surfaces of the object to be washed can be contacted with the detergent. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007136248(A) 申请公布日期 2007.06.07
申请号 JP20050302860 申请日期 2005.10.18
申请人 ARAKAWA CHEM IND CO LTD 发明人 ZENFUKU KAZUKI;ISHIDA OKINORI
分类号 B08B11/02;H01L21/304 主分类号 B08B11/02
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