WHEAT STONE BRIDGE CIRCUIT RESISTANCE MEASUREMENT SYSTEM AND RESISTANCE MEASUREMENT METHOD

摘要

Provided is a system capable of measuring a resistance value of each resistors constituting a wheat stone bridge circuit. The system includes a probe card (4) having probes so that two probes are brought into contact with each of the four terminal electrodes of the wheat stone bridge circuit. Moreover, the system includes a terminal electrode of the wheat stone bridge circuit and a flitting circuit (5) for electrically connecting the probe by using the flitting phenomenon. Furthermore, the present system includes a resistance measurement unit (3) for measuring a current and potential difference between the terminal electrodes of the wheat stone bridge circuit by the four-terminal method. Moreover, the present system includes a resistance measurement control unit (2) for calculating the resistance value of each of the resistors constituting the wheat stone bridge circuit by using the current and the potential difference between the terminal electrodes measured by the resistance measurement unit (3).