| 摘要 |
A DSP chemical mixing apparatus for preparing DSP chemical and a method thereof are provided to allow efficient preparation of DSP chemical for removing remaining polymer from a semi-conductive board, to minimized heat generation during preparation of DSP chemical, and to save manufacturing cost. The DSP chemical mixing apparatus for preparing DSP chemical comprises: a mixing container(110) providing a space for preparing DSP chemical by mixing sulfuric acid, hydrogen superoxide, fluoric acid, and ultra-pure water; a circulation member(120); a treatment solution supplying member(130) supplying the chemical substances to the mixing container(110); and a control part(140) controlling the supplying amount of the sulfuric acid and fluoric acid.
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