| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of reducing the deterioration of member or optical characteristics. <P>SOLUTION: A mechanism is provided for adding a substance, effective to return a substance activated by exposure light to the inactivated condition. A gas injection port 33 and a gas suction port 36 are provided near a projection lens; and gas containing carbon monoxide is made to flow from a gas supplying unit 31 to react with active substance in a system, for example, ozone, active oxygen, OH radical or the like, and inactivate them. The gas is collected by a collecting unit 34. <P>COPYRIGHT: (C)2007,JPO&INPIT |
