| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-reliability optical modulator which reduces warpage of a member due to a difference in thermal expansion between different kinds of materials, prevents large thermal stress from being generated in a joining part between members, and can be manufactured at a low cost, and its manufacturing method. SOLUTION: A terminal part 1c of the high-reliability optical modulator is so structured that a ceramic ring 8 having a recessed groove 9 and a ceramic flat plate 2 are joined to both surfaces of a Kovar(R) ring 3b respectively, the Kovar ring 3b is joined to an SUS-made metal frame 5a, and further many pins 4 inserted, in a non-contact manner into hole parts 7a to 7c provided to the metal frame 5a, ceramic ring 8, and Kovar ring 3b are inserted into a hole part 6 for fixation of the ceramic flat plate 2 and joined. COPYRIGHT: (C)2007,JPO&INPIT |
