| 摘要 |
PROBLEM TO BE SOLVED: To improve mechanical strength against bending or torsion. SOLUTION: A beam 3 that supports an infrared absorption section 2 with respect to a substrate 1 and includes polysilicon 30 and 31 functioning as thermopile for detecting rise in temperature of the infrared absorption section 2 is constituted with a projection 32b formed on a base 32a. COPYRIGHT: (C)2007,JPO&INPIT
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