发明名称 APPARATUS FOR CONTINUOUS CLOCKING OF TDI SENSORS
摘要 A method and apparatus for propagating charge through a sensor and implementation thereof is provided. The method and apparatus may be used to inspect specimens, the sensor operating to advance an accumulated charge between gates of the TDI sensor. The design implementation provides a set of values representing a plurality of out of phase signals, such as sinusoidal or trapezoidal signals. These out of phase signals are converted and transmitted to the sensor. The converted signals cause the sensor to transfer charges in the sensor toward an end of the sensor. Aspects such as feed through correction and correction of nonlinearities are addressed.
申请公布号 WO2007064910(A2) 申请公布日期 2007.06.07
申请号 WO2006US46031 申请日期 2006.11.30
申请人 KLA-TENCOR TECHNOLOGIES CORPORATION;BROWN, DAVID, LEE;CAO, KAI;CHUANG, YUNG-HO 发明人 BROWN, DAVID, LEE;CAO, KAI;CHUANG, YUNG-HO
分类号 G01N21/956;H04N5/335 主分类号 G01N21/956
代理机构 代理人
主权项
地址