| 摘要 |
<P>PROBLEM TO BE SOLVED: To properly adjust a spherical aberration correction value and focus bias to be in a margin center position even when a contour line of evaluation value characteristics is obtained in a distorted shape. <P>SOLUTION: When a center point within a predetermined necessary margin expected range is moved in a predetermined search range, a value of an evaluation signal at a plurality of predetermined points within the necessary margin expected range is obtained for each moving point. The worst value among the values of the evaluation signals of the plurality of predetermined points is set as a representative value for each moving point. Based on the spherical aberration correction value and the focus bias value of a center point when any representative value where the value of the evaluation signal is better by a predetermined amount or more among the representative values of the moving points is obtained, a spherical aberration value and a focus bias value to be set for the spherical aberration correction means and the focus bias means are adjusted. Thus, the spherical aberration value and the focus bias value are adjusted to be in a necessary margin center position. <P>COPYRIGHT: (C)2007,JPO&INPIT |
