| 摘要 |
PROBLEM TO BE SOLVED: To provide a prober capable of accurately setting the temperature of a device to be examined with simple configuration. SOLUTION: In a prober, terminals of testers 21, 22 are connected to electrodes of a plurality of semiconductor devices formed on a wafer W in order to examine the semiconductor devices using the testers. The prober comprises a probe card 18 including a probe 19 for connecting the electrodes to the terminals of the testers in contact with the electrodes of the semiconductor devices, a wafer chuck 11 for holding the wafer, and a dipping liquid source 34 for supplying a dipping liquid DL with electric insulation property and high heat conductivity onto the wafer held by the wafer chuck. COPYRIGHT: (C)2007,JPO&INPIT
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