| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow passage block used to achieve a chemical supply unit with a chemical valve attached to the flow passage block. SOLUTION: This flow channel passage forms two ports 36 on one face of a rectangular parallelpiped, and has a curved communicating passage 37 communicating with two ports 36. For example, a tube member 30 in which two ports 36 and the communicating passage 37 are integrally formed, is mounted on a rectangular block member 20 to form the curved communicating passage 37. COPYRIGHT: (C)2007,JPO&INPIT
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