| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate filled with a filler for achieving both of precision processing and mass productivity. SOLUTION: The method for manufacturing a substrate filled with a filler having at least one recessed portion on at least one surface and applying energy to the surface protected by a protective film excluding the recessed portion, after the recessed portion is filled with a curable filler, to cure the filler, is provided with a tacky portion between the protective film and the substrate and the tackiness of the tacky portion decreases by the energy. COPYRIGHT: (C)2007,JPO&INPIT
|
