| 摘要 |
The present invention provides a complex optical device capable of decreasing electric power consumption, generating a high quality laser, and modulating the laser without degradation. The complex optical device includes a laser diode element (LD) and an electroabsorption modulator element (EAM) which are formed on the same substrate and optically coupled with each other. Both of the LD and the EAM are formed from a semiconductive upper cladding layer having a first conductive type, an insulating core layer, and a semiconductive lower cladding layer having a second conductive type opposite to the first conductive type. The electrical isolation layer extending through the core layer from the surface of the upper cladding layer up to the surface of the substrate is formed by an ion injection at an area between the LD and the EAM to isolate the LD and the EAM electrically. The ion injection does not optically have an influence on the insulating core layer through which the LD and the EAM are optically coupled with each other.
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