PLASMA ETCHING METHOD,申请号JP19780149444-传众专利搜索

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发明名称	PLASMA ETCHING METHOD
摘要
申请公布号	JPS5576074(A)	申请公布日期	1980.06.07
申请号	JP19780149444	申请日期	1978.12.01
申请人	MITSUBISHI ELECTRIC CORP	发明人	ENOMOTO TATSUYA;HARADA HIROJI
分类号	C23F4/00;C23F1/02;H01L21/00;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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