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发明名称
摘要
申请公布号
JP3926588(B2)
申请公布日期
2007.06.06
申请号
JP20010220231
申请日期
2001.07.19
申请人
发明人
分类号
C23C16/30;H01L21/316;C23C16/02;C23C16/40;C23C16/509;H01L21/31;H01L21/312;H01L21/3205;H01L21/768;H01L23/52
主分类号
C23C16/30
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代理人
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