Substratverarbeitungsvorrichtung,申请号DE20006034510-传众专利搜索

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发明名称	Substratverarbeitungsvorrichtung
摘要
申请公布号	DE60034510(D1)	申请公布日期	2007.06.06
申请号	DE20006034510	申请日期	2000.06.14
申请人	EBARA CORP.	发明人	SHINOZAKI, HIROYUKI
分类号	H01L21/00;H01L21/30;B05C11/08;C23C16/458;H01L21/68	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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