METHODS AND SYSTEMS FOR PROCESSING MICROFEATURE WORKPIECES WITH FLOW AGITATORS AND/OR MULTIPLE ELECTRODES

摘要

Tools having mounting modules with registration systems are disclosed. The mounting includes positioning elements for precisely locating a reactor and a workpiece transport that moves workpieces to and for the reactor. The relative positions between positioning elements of the reactor are fixed so that the workpiece transport does not need to be recalibrated when the reactor is removed and replaced with another reactor. The reactor includes an agitator for agitating processing fluid at a process surface of the workpiece. The agitator, the reactor, and electrodes within the reactor are configured to reduce the likelihood for electrical shadowing created by the agitator at the surface of the workpiece, and to account for three-dimensional effects on the electrical field as the agitator and/or the workpiece reciprocate relative to each other.