| 摘要 |
The present piezoelectric/electrostrictive film-type device comprises a ceramic substrate (1) having a thin diaphragm portion (3) and a peripheral thick portion (2), a lower electrode (4), an auxiliary electrode (8), a piezoelectric/electrostrictive film (5), and an upper electrode (6); the lower electrode, the piezoelectric/electrostrictive film, and the upper electrode having been layered in that order on the ceramic substrate. The upper electrode (L u ) has a length of 30 to 70% relative to the length (L d ) of the thin diaphragm portion, and preferably has a width of 70% or more relative to the width of the thin diaphragm portion. |
