发明名称 |
Lithographische Maske, lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung |
摘要 |
A reflective mask has a sub-resolution texture applied to absorbing areas to reduce the amount of power in the specular reflection. The texture may form a phase contrast grating or may be a diffuser. The same technique may be applied to the other absorbers in a lithographic apparatus. |
申请公布号 |
DE60309238(T2) |
申请公布日期 |
2007.06.06 |
申请号 |
DE2003609238T |
申请日期 |
2003.03.06 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
EURLINGS, MARKUS FRANCISCUS ANTONIUS;VAN DIJSSELDONK, ANTONIUS JOHANNES JOSEPHUS;DIERICHS, MARCEL MATHIJS THEODORE MARIE |
分类号 |
G03F1/00;G03F1/24;G03F7/20;H01L21/027 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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