VERBESSERTE METHODE EINE OXIDSCHICHT ZU ÄTZEN,申请号DE19986035032T-传众专利搜索

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发明名称	VERBESSERTE METHODE EINE OXIDSCHICHT ZU ÄTZEN
摘要
申请公布号	DE69835032(T2)	申请公布日期	2007.06.06
申请号	DE19986035032T	申请日期	1998.12.11
申请人	LAM RESEARCH CORP.	发明人	BUI-LE, QUYNH;ARIMA, Y.
分类号	H01L21/302;H01L21/311;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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