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发明名称
PLASMABEHANDLUNGSVORRICHTUNG UND -VERFAHREN
摘要
申请公布号
DE69736267(T2)
申请公布日期
2007.06.06
申请号
DE19976036267T
申请日期
1997.05.22
申请人
TOKYO ELECTRON LTD.
发明人
MABUCHI, HIROSHI;HAYAMI, TOSHIHIRO;HONDA, SHIGEKI
分类号
H05H1/46;C23C16/50;C23C16/511;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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