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发明名称
Verfahren und System zum Charakterisieren von porösen Materialien
摘要
申请公布号
DE112005001676(T5)
申请公布日期
2007.06.06
申请号
DE200511001676
申请日期
2005.07.15
申请人
TOKYO ELECTRON LTD.
发明人
ZHU, JIANHONG;TOMA, DOREL IOAN
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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