发明名称 Spectrum based endpointing for chemical mechanical polishing
摘要 Methods and apparatus for providing a flushing system for flushing a top surface of an optical head. The flushing system includes a source of gas configured to provide a flow of gas, a delivery nozzle, a delivery line that connects the source of gas to the delivery nozzle, a vacuum source configured to provide a vacuum, a vacuum nozzle, and a vacuum line that connects the vacuum source to the vacuum nozzle. The source of gas and the delivery nozzle are configured to direct a flow of gas across the top surface of the optical head. The vacuum nozzle and vacuum sources are configured so that the flow if gas is laminar.
申请公布号 US7226339(B2) 申请公布日期 2007.06.05
申请号 US20050213674 申请日期 2005.08.26
申请人 APPLIED MATERIALS, INC. 发明人 BENVEGNU DOMINIC J.;DAVID JEFFREY DRUE;SWEDEK BOGDAN
分类号 B24B49/00 主分类号 B24B49/00
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