Contact probe, measuring pad used for the contact probe, and method of manufacturing the contact probe

摘要

There is provided a contact probe that is smaller than 50 mum in a pitch between a signal electrode and a ground electrode and can correctly conduct a high-speed high-frequency measurement, a measuring pad used for the contact probe, and a method of manufacturing the contact probe. The contact probe includes: a tip member having a signal electrode 10 a and a ground electrode 11 a that are put into contact with an object to be measured; and a coaxial cable 1 having a core 1 b electrically connected to the signal electrode 10 a and an outer covering conductor la electrically connected to the ground electrode 11 a, wherein the tip member is formed on a printed wiring board 2 , and wherein the signal electrode 10 a and the ground electrode 11 a are constructed of fine coplanar strip lines formed on an insulating board 2 a.