| 摘要 |
<p>A support device for supporting a set of integrated circuit units (65), the devicecomprising: a support member having a metal surface, said surface having an arrayof recesses (27); a soft material layer, overlaying the recesses of the metalsurface so as to protect the units (65) from damage caused by contact with the metalsurface, and; a vacuum means (35) in communication with said recesses (27), suchthat the vacuum means supports each unit within a respective recess, whereinthe soft material layer is formed of a plurality of independent inserts (40),each insert engageable with at least one recess using engagement means (50, 55)for engaging each insert (40) with the at least one recess (27).</p> |
