发明名称 |
Electron source manufacturing apparatus and electron source manufacturing method |
摘要 |
In an electron source manufacturing apparatus, the quantity of heat generated from an electron source substrate is measured. A temperature of a support member for the electron source substrate is controlled based on the measured quantity of heat generated. A variation in performances of electron source substrates is suppressed, which increase their life.
|
申请公布号 |
US7226331(B2) |
申请公布日期 |
2007.06.05 |
申请号 |
US20040957839 |
申请日期 |
2004.10.05 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KAMATA SHIGETO;OKI KAZUHIRO;KIMURA AKIHIRO;TAKATSU KAZUMASA |
分类号 |
H01J9/00;H01J9/02;H01J9/42 |
主分类号 |
H01J9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|