Method of forming refractory metal conductors of low resistivity

摘要

The resistivity of a conductor of a refractory metal such as molybdenum is reduced by converting at least a portion of the conductor into a layer of molybdenum nitride in an atmosphere including ammonia at a temperature in the range from about 400 DEG C. to about 850 DEG C. and thereafter heating the conductor in an atmosphere including dry hydrogen in the range from about 950 DEG C. to about 1000 DEG C. for a time to convert the layer of molybdenum nitride into molybdenum and to convert molybdenum oxides in the conductor into molybdenum.