IN-LINE EQUIPMENT USING METAL-PLATE BELT SOURCE FOR OLED MANUFACTURING

摘要

An in-line apparatus for manufacturing an OLED(Organic Light Emitting Device) using a metal-plate belt is provided to prevent damage of a TFT array by transferring a substrate using a frictional force between rollers and a lower surface of the substrate. A metal plate belt(35) is laid across two metal plate rotating devices(33), so that the metal plate rotating devices rotate to transfer the metal plate belt continuously. A metal plate heating device(36) is positioned above a center portion of the metal plate belt to heat a portion of metal plates. A separating wall(32) is installed on a lower center portion of a vaporizing source module to prevent interference of vaporized organic materials.