发明名称 APPARATUS AND FABRICATING METHOD OF IMAGE SENSOR
摘要 An image sensor and its fabricating method are provided to improve the sensitivity on incident light by forming a microlens as an inner microlens and an outer microlens. Photodiodes(200) are formed on a semiconductor substrate(100), and an insulation layer and a passivation layer(330) are formed on the substrate. A first planarized photosensitive layer(350) is formed on the passivation layer, and has an inner microlens for focusing light incident on the photodiode. A color filter(400) is formed on the first planarized photosensitive layer. A second planarized photosensitive layer(500) is formed on the color filter, and an outer microlens(650) is formed on the second planarized photosensitive layer.
申请公布号 KR100727268(B1) 申请公布日期 2007.06.04
申请号 KR20050134065 申请日期 2005.12.29
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 HWANG, JOON
分类号 H01L27/146 主分类号 H01L27/146
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