发明名称 HOUSING CONTAINER OF SUBSTRATE, MASK BLANK STORING BODY AND TRANSFER MASK STORING BODY
摘要 A substrate storing container, a mask blank storing body, and a transfer mask storing body are provided to restrict separation of the film by preventing the film from interfering with the lateral side of a groove maintaining an outer peripheral section of the substrate in storing or transferring a glass substrate, thereby properly containing the glass substrate without generation of dust. The mask blank storing body is formed by inserting a mask blank(10) into a storing container in a sealed state. Maintaining grooves(43,45) for receiving outer peripheral sections(11b) of the left, right, and lower sides of the mask blank are formed at the left and right sides and the bottom of a storing container body. Lateral sides(43b,43c,45b,45c) of the maintaining groove do not interfere with an end(14) of a resist film and a light shielding film of the mask blank by properly setting angles(Thetaa,Thetab) of dent edges of the lateral sides and bottom sides(43a,45a) of the maintaining groove.
申请公布号 KR20070057028(A) 申请公布日期 2007.06.04
申请号 KR20060119149 申请日期 2006.11.29
申请人 HOYA CORPORATION 发明人 ARAI HIDETO
分类号 B65D85/48;B65D85/38;H01L21/673 主分类号 B65D85/48
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