REVERSE FLOW PREVENTING AND VACUUM MAINTAINING SYSTEM FOR SEMICONDUCTOR EQUIPMENT

摘要

A reverse flow preventing and vacuum maintaining apparatus of semiconductor manufacturing equipment is provided to prevent contamination of a chamber from a reverse flow effect caused by an abnormal state of a vacuum pump due to electric failure or overload. A plurality of vacuum pumps(20) are used for pumping a plurality of chambers(10). A vacuum line(30) is used for connecting each of the chambers with each of the vacuum pumps. An isolation valve(40) is installed at a connecting part between the chamber and the vacuum line. A reverse flow preventing valve(500) is installed at a connecting part between the vacuum pump and the vacuum line. A vacuum connecting line(600) is used for connecting the vacuum line with the vacuum line. A vacuum maintaining valve(700) is installed at the vacuum connecting line.