DIELECTRIC COMPONENT AND METHOD FOR PREPARING THE SAME

摘要

A dielectric device and a manufacturing method thereof are provided to decrease a leak current density and to reduce fabrication costs by forming an electrode using a low oxidation temperature material. A first stacked structure is formed by forming a dielectric part(14) on a lower electrode(12). A first annealing process is performed on the first stacked structure. A second stacked structure is formed on the resultant structure by forming an upper electrode(16) on the dielectric part. A second annealing process is performed on the second stacked structure under a depression condition. The second annealing process is performed in a temperature range of 150 °C or more. The upper electrode is made of one or more selected from a group consisting of Cu, Ni, Al and Ag.