发明名称 THIN FILM TRANSISTOR AND METHODE FOR FABRICATING THEREOF
摘要 A TFT(Thin Film Transistor) and its manufacturing method are provided to prevent the contamination of an interface between first and second insulating layers and to increase the capacitance of a storage capacitor. A TFT includes an NMOS semiconductor layer and a PMOS semiconductor layer(40) on a substrate(10), a double gate insulating layer, and an NMOS gate electrode and a PMOS gate electrode. The double gate insulating layer is formed on the substrate including the semiconductor layers. The double gate insulating layer is composed of a first insulating layer(60a) and a second insulating layer(60b) on the first insulating layer. The NMOS and PMOS gate electrodes are formed on the second insulating layer.
申请公布号 KR20070056307(A) 申请公布日期 2007.06.04
申请号 KR20050114790 申请日期 2005.11.29
申请人 SAMSUNG SDI CO., LTD. 发明人 KO, MOO SOON;HWANG, EUI HOON
分类号 H01L29/786 主分类号 H01L29/786
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