发明名称 APPARATUS AND METHOD FOR FABRICATING FLAT PANEL DISPLAY
摘要 A manufacturing device and a method of a flat panel display are provided to spray ions to the substrate and to measure the amount of static electricity induced to a substrate in real time, by integrating a static electricity removing unit and a static electricity measuring unit. A manufacturing device of a flat panel display is composed of a static electricity removing unit(112) eliminating static electricity of a substrate(111); a measuring unit(114) integrated with the static electricity removing unit to measure the amount of static electricity induced to the substrate; a control unit(116) for comparing the amount of static electricity measured by the measuring unit, with the reference static electricity amount; and a display unit(118) for displaying a comparison result value output from the control unit.
申请公布号 KR20070056498(A) 申请公布日期 2007.06.04
申请号 KR20050115198 申请日期 2005.11.30
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 IM, UNG BIN
分类号 G01R29/12 主分类号 G01R29/12
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