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发明名称
COPPER (II) COMPLEXES FOR DEPOSITION OF COPPER FILMS BY ATOMIC LAYER DEPOSITION
摘要
申请公布号
IL180768(D0)
申请公布日期
2007.06.03
申请号
IL20070180768
申请日期
2007.01.17
申请人
E.I. DU PONT DE NEMOURS AND COMPANY
发明人
分类号
C23C
主分类号
C23C
代理机构
代理人
主权项
地址
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