用于光微影技术之组成物与制程,申请号TW095136654-传众专利搜索

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发明名称	用于光微影技术之组成物与制程
摘要	本发明系关于涂布于光阻组成物上之覆盖涂层(overcoating layer)组成物，其包括用于湿浸式微影制程(immersion lithography processing)及非湿浸式成像(non-immersionimaging)者。
申请公布号	TW200720841	申请公布日期	2007.06.01
申请号	TW095136654	申请日期	2006.10.03
申请人	罗门哈斯电子材料有限公司	发明人	王大洋;徐承柏
分类号	G03F7/004(2006.01);G03F7/039(2006.01);G03F7/09(2006.01);H01L21/027(2006.01)	主分类号	G03F7/004(2006.01)
代理机构		代理人	洪武雄;陈昭诚
主权项
地址	美国

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