| 摘要 |
PURPOSE:To obtain gas laser tubes of a long lifetime by a method wherein an anode is installed at a point on the extension line of a plasma capillary penetrating the wall of a vacuum casing, and by having a part protruded in the direction of the effective section of the plasma capillary inside the vacuum casing, thereby enabling to enhance the initial output by having a long effective length of the plasma capillary and by controlling the decrease of output by reducing the adverse effect on the mirror to be used for anodic sputtering. CONSTITUTION:An anode 3 has a part bent toward a plasma capillary 1 inside a vacuum casing, the distance of vacant space between the anode 3 and a mirror 4' is reduced, and the effective length of the plasma capillary is increased in the amount of the reduction of the vacant space. According to this constitution, the plasma blown out from one end 1' of the plasma capillary 1 is concentrated at the anode extension part 3' located in the vicinity of the capillary end 1', thereby enabling to keep away the discharge plasma and the anode sputtering from the vapor-deposition surface of the mirror 4'. |
