发明名称 |
PROBE PIN AND METHOD FOR MANUFACTURING PROBE PIN |
摘要 |
<p>[PROBLEMS] To ensure high dimensional accuracy and productivity of a probe pin having a height. [MEANS FOR SOLVING PROBLEMS] A groove is formed on a side plane of the probe pin, and a leading end side having a contact section is bent from a groove portion. The leading end of the probe pin is sharply formed to be the contact section. The rear end side from the groove on the probe pin is bonded to a connection terminal of a contactor, and the leading end side of the probe pin is bent from the groove portion to the lower side where a wafer is arranged. Electrical characteristics of the wafer are inspected by bringing the contact section of the probe pin into contact with the wafer.</p> |
申请公布号 |
WO2007060935(A1) |
申请公布日期 |
2007.05.31 |
申请号 |
WO2006JP323182 |
申请日期 |
2006.11.21 |
申请人 |
TOKYO ELECTRON LIMITED;TAKEKOSHI, KIYOSHI;TAWARA, TSUYOSHI |
发明人 |
TAKEKOSHI, KIYOSHI;TAWARA, TSUYOSHI |
分类号 |
G01R1/067 |
主分类号 |
G01R1/067 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|