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发明名称
METHODS OF USING REFERENCE INFORMATIONS RELATED TO A SEMICONDUCTOR SUBSTRATE IN A SEMICONDUCTOR FABRICATION LINE WITH A COMPUTER SHOWING A PLURALITY OF INFORMATION ICONS
摘要
申请公布号
KR20070055912(A)
申请公布日期
2007.05.31
申请号
KR20050114417
申请日期
2005.11.28
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, HYUNG CHUL
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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