发明名称 METHOD FOR FORMING METALLIC FILM AND METAL PATTERN
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for forming a metallic film which has superior adhesiveness to a substrate, sufficient electroconductivity and small unevenness in the interface with the substrate, by a simple method, and to provide a method for forming a fine metal-pattern which has superior adhesiveness to the substrate, sufficient electroconductivity and small unevenness in an interface with the substrate without carrying out an etching step, by a simple method. <P>SOLUTION: The method for forming the metallic film comprises the steps of: (a1) arranging a polymer layer made from a polymer which has a functional group interacting with a metallic ion or a metal salt and directly chemically bonds to a substrate, on the substrate; (a2) imparting the metallic ion or the metal salt to the polymer layer; (a3) reducing the metallic ion or the metal salt to form an electroconductive layer with surface resistivity of 10 to 100 k&Omega;/SQUARE; and (a4) forming an electroconductive layer with surface resistivity of 1&times;10<SP>-1</SP>&Omega;/SQUARE or less by electroplating. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007131875(A) 申请公布日期 2007.05.31
申请号 JP20050323442 申请日期 2005.11.08
申请人 FUJIFILM CORP 发明人 MATSUMOTO KAZUHIKO
分类号 C23C18/16;C23C18/30;C25D3/38;C25D5/56;C25D21/12;C25D21/14;G03F7/20;H05K3/18 主分类号 C23C18/16
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