| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide method and system of applying an electric power to a pressure and temperature sensing element. <P>SOLUTION: In the system, a polarity change is added to a current source of a sensor. The sensor includes one piezo-resistance sensing element as a single injected rectangle locating at an edge part of a diaphragm of the element and forms an output of pressure and temperature. The piezo-resistance sensing element performs as a diametrical direction piezo-resistance element when the current is passing through the element in the diametrical direction for the diaphragm. To the contrary, the piezo-resistance sensing element performs as a tangential direction piezo-resistance element when the current is passing through the element in the tangential direction for the edge part of the diaphragm. The difference between the diametrical direction resistance and the tangential direction resistance is proportional to the adding pressure, and the sum of these resistances is a function of temperature. Accumulation of ion resulting from PUD is made into minimum, by alternating the polarity of the electric power imposed to the sensor. <P>COPYRIGHT: (C)2007,JPO&INPIT |
