| 摘要 |
<p>The unit comprises a vertical panel (1) separating the workshop into a medium cleanness area (2) and a maximum cleanness area (3), an elongated container (4) in the area (2) and a housing (6) inserted in an opening (5) of the panel (1); the tubes are cleaned and pre-rinsed in the container (4), and than rinsed and dried in the housing (6) which is also used as lock-chamber for transferring the tubes between the areas (2) and (3). Application to the making of integrated circuits.</p> |
