| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute mold which is manufactured by an electrolytic plating method and can easily demold a molding and in which the side wall of its uneven part is excellently smooth and a simple method for producing the minute mold. SOLUTION: In the method for producing the minute mold by the electrolytic plating method, when a prescribed minute pattern is formed on a conductive substrate with a photosensitive resin by a photolithographic method, exposure is carried out by directly irradiating the photosensitive resin with converged ultraviolet laser beams while the pattern is scanned. COPYRIGHT: (C)2007,JPO&INPIT
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