| 摘要 |
Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
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