发明名称 |
Method and System for Calibrating A Micro-Electromechanical System (MEMS) Based Sensor Using Tunneling Current Sensing |
摘要 |
A system and method for controlling a tunneling current between a first element and a second element of a micro-electro-mechanical system (MEMS) sensor. The system includes a tunneling current excitation source for providing a tunneling current between the elements and a tunneling current monitor for monitoring a change in the tunneling current responsive to movement of at least one element. The system also includes a positioner for positioning at least one of the elements and a controller in communication with the tunneling current monitor for controlling the positioner to position at least one of the elements at a first spacing between the elements for configuring the system in a referencing mode; and to position the elements at a second spacing for configuring the system in a sensing mode, whereby the system is calibrated with respect to the referencing mode.
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申请公布号 |
US2007120553(A1) |
申请公布日期 |
2007.05.31 |
申请号 |
US20070619227 |
申请日期 |
2007.01.03 |
申请人 |
ANDARAWIS EMAD A;BERKCAN ERTUGRUL |
发明人 |
ANDARAWIS EMAD A.;BERKCAN ERTUGRUL |
分类号 |
G01R1/20 |
主分类号 |
G01R1/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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