发明名称 LARGE AREA SEMICONDUCTOR ON GLASS INSULATOR
摘要 <p>Methods and apparatus provide for contacting respective first surfaces of a plurality of donor semiconductor wafers with a glass substrate; bonding the first surfaces of the plurality of donor semiconductor wafers to the glass substrate using electrolysis; separating the plurality of donor semiconductor wafers from the glass substrate leaving respective exfoliation layers bonded to the glass substrate; and depositing a further semiconductor layer on exposed surfaces of the exfoliation layers to augment a thickness of the exfoliation layers.</p>
申请公布号 WO2007061563(A1) 申请公布日期 2007.05.31
申请号 WO2006US41660 申请日期 2006.10.26
申请人 CORNING INCORPORATED;GADKAREE, KISHOR, P.;MAYOLET, ALEXANDRE, M. 发明人 GADKAREE, KISHOR, P.;MAYOLET, ALEXANDRE, M.
分类号 H01L21/762 主分类号 H01L21/762
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