发明名称 |
DYNAMICALLY BALANCED CAPACITIVE PICK-OFF ACCELEROMETER |
摘要 |
A Micro Electro-Mechanical System (MEMS) acceleration sensing device formed of a silicon substrate having a substantially planar surface; a pendulous sensing element having a substantially planar surface suspended in close proximity to the substrate planar surface; a flexure suspending the sensing element for motion relative to the substrate planar surface, the flexure having a both static geometric centerline and a dynamic centerline that is offset from the static geometric centerline; and a metal electrode positioned on the substrate surface for forming a capacitor with the pendulous sensing element, the metal electrode being positioned as a function of the dynamic centerline of the flexure.
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申请公布号 |
WO2005121810(A9) |
申请公布日期 |
2007.05.31 |
申请号 |
WO2005US19913 |
申请日期 |
2005.06.07 |
申请人 |
HONEYWELL INTERNATIONAL INC.;MALAMETZ, DAVID, L. |
发明人 |
MALAMETZ, DAVID, L. |
分类号 |
G01P15/125;G01P15/00;G01P15/08 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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