| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly sensitive pressure sensor of high pressure-proofness capable of securing an operation area from a contact start-up to a saturation area, over a wide area ranging up to high pressure. SOLUTION: This pressure sensor has a base body 30, and a detecting piece 20 comprising a flexible thin wall part 22 and a thick wall part 24 formed in the periphery of the thin wall part 22, wherein the thick wall part 24 is joined to the base body 30 to form a sealed space between the base body 30 and the thin wall part 22, and is constituted to form an upper electrode film 26 in the thin wall part 22 on an under face of the detecting piece 20, to form a lower electrode film 32 in a portion opposed to the upper electrode film 26 on an upper face of the base body 30 and to coat the lower electrode film 32 with a dielectric film 34. The thin wall part 22 is constituted of a flat part 22a, and an inclined part 22b formed integrally with the flat part 22a and having a wall thickness thickened gradually toward the thick wall part 24, and the upper electrode film 26 is arranged in the inclined part 22b. COPYRIGHT: (C)2007,JPO&INPIT
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