| 摘要 |
Microinjectors are provided. A microinjector includes a substrate, a channel, a nozzle formed at an end of the channel, and a deformable mechanism disposed on the substrate. A droplet is generated by ejecting fluid through the nozzle. The deformable mechanism comprises a piezoelectric layer and a flexible member. The flexible member connects the piezoelectric layer and the substrate, defining a part of the channel. When an electrical field is applied to the piezoelectric layer, the flexible member and the piezoelectric layer are deformed, altering profile of the channel.
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